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Volumn 355, Issue 3-4, 1996, Pages 250-251
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Characteristic temperatures and electron number densities in an R.F. capacitively coupled plasma
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
CALCIUM;
ELECTRON DENSITY;
EMISSION SPECTROSCOPY;
IRON;
CAPACITIVE COUPLING;
EXCITED STATE TEMPERATURE;
RADIATION SOURCES;
RADIOFREQUENCY;
PLASMAS;
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EID: 0030375013
PISSN: 09370633
EISSN: None
Source Type: Journal
DOI: 10.1007/s0021663550250 Document Type: Article |
Times cited : (7)
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References (6)
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