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Volumn 355, Issue 3-4, 1996, Pages 250-251

Characteristic temperatures and electron number densities in an R.F. capacitively coupled plasma

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CALCIUM; ELECTRON DENSITY; EMISSION SPECTROSCOPY; IRON;

EID: 0030375013     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: 10.1007/s0021663550250     Document Type: Article
Times cited : (7)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.