|
|
Volumn 438, Issue , 1996, Pages 333-343
|
|
Synthesis of SOI materials using plasma immersion ion implantation
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
BONDING;
FABRICATION;
HELIUM;
HYDROGEN;
IONS;
PLASMA APPLICATIONS;
SEMICONDUCTOR PLASMAS;
SILICON ON INSULATOR TECHNOLOGY;
SILICON WAFERS;
SYNTHESIS (CHEMICAL);
PLASMA IMMERSION ION IMPLANTATION;
SEPARATION BY PLASMA IMPLANTATION OF OXYGEN;
ION IMPLANTATION;
|
|
EID: 0030374848
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-438-333 Document Type: Conference Paper |
|
Times cited : (5)
|
|
References (17)
|
