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Volumn 59, Issue , 1996, Pages 177-182
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Experiments and simulations on a micro-mixer fabricated using a planar silicon/glass technology
a
DANFOSS A S
(Denmark)
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
DIFFUSION IN LIQUIDS;
FLOW OF FLUIDS;
MICROELECTROMECHANICAL DEVICES;
OPTIMIZATION;
PLATES (STRUCTURAL COMPONENTS);
SEMICONDUCTING GLASS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MANUFACTURE;
FLOW COMPONENTS;
SILICON/GLASS FABRICATION TECHNOLOGY;
MIXERS (MACHINERY);
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EID: 0030373343
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (6)
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References (10)
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