Investigation of the role of Ni in forming ultra-low resistance Ni-Ge-Au ohmic contacts to n + GaAs

Conference on Optoelectronic & Microelectronic Materials and Devices, Proceedings, COMMAD

Volumn , Issue , 1996, Pages 341-344

  Lumpkin, Nancy E ^a   Lumpkin, Gregory R ^a  

^a CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

DOPANT DISTRIBUTION;

COMPOSITION EFFECTS; ELECTRIC RESISTANCE; ELECTRON BEAMS; METALLOGRAPHIC MICROSTRUCTURE; NICKEL ALLOYS; OPTIMIZATION; SEMICONDUCTING GALLIUM ARSENIDE;

OHMIC CONTACTS;

EID: 0030371557     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)