Development of apparatus for measuring stress in semiconductor devices by applying microscopic Raman spectroscopy using an ultraviolet laser

Nippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A

Volumn 62, Issue 604, 1996, Pages 2750-2756

  Ishitsuka, N ^a   Sakata, H ^a   Nishimura, A ^a   Miura, H ^a   Kumazawa, T ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

LASER APPLICATIONS; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SEMICONDUCTOR DEVICES;

LASER-AIDED DIAGNOSTICS; MICROSCOPIC RAMAN SPECTROSCOPY;

STRESS ANALYSIS;

EID: 0030368408     PISSN: 03875008     EISSN: None     Source Type: Journal    
DOI: 10.1299/kikaia.62.2750     Document Type: Article

References (11)