Plasma flood system - physics of low energy electron generation, plasma coupling, electron transport and surface charge neutralization on wafer

Proceedings of the International Conference on Ion Implantation Technology

Volumn , Issue , 1996, Pages 432-435

  Ito, Hiroyuki ^a   Current, Michael I ^a  

^a Applied Materials   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC ARCS; ELECTRIC SPACE CHARGE; ELECTRON EMISSION; ELECTRON SOURCES; MAGNETIC FIELD EFFECTS; PLASMA CONFINEMENT; PLASMA SOURCES;

PLASMA DISCHARGE CHAMBERS; PLASMA FLOOD SYSTEMS (PFS);

PLASMA ACCELERATORS;

EID: 0030368342     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)