Surface processing by gas cluster ion beams

Proceedings of the International Conference on Ion Implantation Technology

Volumn , Issue , 1996, Pages 808-811

  Toyoda, Noriaki ^a   Matsuo, Jiro ^a   Yamada, Isao ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COMPOSITION EFFECTS; ION BEAMS; ION BOMBARDMENT; SILICON; SPUTTERING; SULFUR COMPOUNDS; SURFACE ROUGHNESS; TUNGSTEN;

GAS CLUSTER ION BEAMS; SMOOTHING EFFECT; SURFACE PROCESSING;

SURFACE TREATMENT;

EID: 0030368335     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)