Liquid delivery MOCVD of PLT for pyroelectric detectors

IEEE International Symposium on Applications of Ferroelectrics

Volumn 1, Issue , 1996, Pages 227-230

  Roeder, J F ^a   Chen, I S ^a   Van Buskirk, P C ^a   Beratan, H R ^a  

^a Advanced Technology Materials Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; INFRARED DETECTORS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY; PEROVSKITE; PIEZOELECTRIC DEVICES; SEMICONDUCTING LEAD COMPOUNDS; SUBSTRATES; VAPORIZATION;

BYER-ROUNDY TECHNIQUE; LIQUID DELIVERY TECHNIQUE; PYROELECTRIC DETECTORS;

THIN FILMS;

EID: 0030368183     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)