Roles of low energy electrons in the fabrication process using scanning tunnelling microscope

Chinese Physics Letters

Volumn 13, Issue 10, 1996, Pages 750-752

  Wang, Chen ^a   Bai, Chun Li ^a   Li, Xiao Dong ^b   Shang, Guang Yi ^a   Qiu, Xiao Hui ^a  

^a INSTITUTE OF CHEMISTRY   (China)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; SCANNING TUNNELING MICROSCOPY;

CONTINUUM ELECTRONS; ELECTRON DIFFUSION; FABRICATION PROCESS; LOW ENERGY ELECTRONS; MODEL-BASED OPC; NANOSCALE FEATURES; SCANNING TUNNELLING MICROSCOPES; SIMPLE MODELING; SUB-SURFACES; SURFACE CHARACTERISTICS;

ELECTRONS;

EID: 0030367516     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/13/10/010     Document Type: Article

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