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Volumn 356, Issue 1, 1996, Pages 31-36
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Optimization of ETV-ICP-MS conditions for the determination of multi-elements in semiconductor grade acids
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Author keywords
[No Author keywords available]
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Indexed keywords
ACIDS;
ELECTRONICS INDUSTRY;
IMPURITIES;
MASS SPECTROMETRY;
OPTIMIZATION;
COUPLED METHOD;
HIGH PURITY;
INDUCTIVE COUPLING PLASMA SPECTROMETRY;
MULTICOMPONENT ANALYSIS;
THERMOELECTRIC ATOMIZATION;
CHEMICAL ANALYSIS;
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EID: 0030367189
PISSN: 09370633
EISSN: None
Source Type: Journal
DOI: 10.1007/s0021663560031 Document Type: Article |
Times cited : (6)
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References (27)
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