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Volumn 355, Issue 7-8, 1996, Pages 847-852
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Requirements of the glow discharge techniques to the fundamentals: an exemplary approach
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL ANALYSIS;
GASES;
GLOW DISCHARGES;
MASS SPECTROMETRY;
SOLIDS;
SPUTTERING;
ANALYTICAL METHOD;
DISCHARGE BREAKDOWN;
EXPERIMENTAL STUDY;
OPTICAL SPECTROMETRY;
ELECTRIC DISCHARGES;
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EID: 0030364669
PISSN: 09370633
EISSN: None
Source Type: Journal
DOI: 10.1007/s0021663550847 Document Type: Article |
Times cited : (7)
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References (21)
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