Microwave sputtering of conductors and insulators for optical emission and mass spectrometry

Fresenius' journal of analytical chemistry

Volumn 355, Issue 7-8, 1996, Pages 820-825

  Rummeli, M H ^a   Outred, M ^a   Spillane, D E M ^a   Steers, E B M ^a  

^a LONDON METROPOLITAN UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE MATERIALS; EMISSION SPECTROSCOPY; MASS SPECTROMETRY; SPUTTERING;

ANALYSIS METHOD; INSTRUMENTATION; MICROWAVE DISCHARGE; NON CONDUCTOR MATERIAL; OPERATING CONDITIONS;

CHEMICAL ANALYSIS;

EID: 0030364668     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)