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Volumn 17, Issue 4, 1996, Pages 215-219
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Novel engineering coatings produced by closed-field unbalanced magnetron sputtering
a a b b |
Author keywords
Closed field; Corrosion; Engineering materials; Magnetron sputtering; Wear
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Indexed keywords
CORROSION PROTECTION;
PROTECTIVE COATINGS;
SPUTTER DEPOSITION;
THIN FILMS;
WEAR RESISTANCE;
UNBALANCED MAGNETRON SPUTTERING;
MAGNETRON SPUTTERING;
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EID: 0030364415
PISSN: 02613069
EISSN: None
Source Type: Journal
DOI: 10.1016/S0261-3069(97)00009-5 Document Type: Article |
Times cited : (25)
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References (13)
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