Ibis 1000 SIMOX production implanter

Proceedings of the International Conference on Ion Implantation Technology

Volumn , Issue , 1996, Pages 436-439

  Ryding, G ^a   Smick, T H ^a   Farley, M ^a   Cordts, B F ^a   Dolan, R P ^a   Allen, L P ^a   Mathews, B ^a   Wray, W ^a   Amundsen, B ^a   Anc, M J ^a  

^a Ibis Technology Corp   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; ION IMPLANTATION; ION SOURCES; OXYGEN; SERVOMECHANISMS; SILICON ON INSULATOR TECHNOLOGY;

BEAM SCAN SYSTEMS; MASS ANALYZER; PRODUCTION IMPLANTERS; SEPARATION BY IMPLANTED OXYGEN (SIMOX) WAFER;

PARTICLE ACCELERATORS;

EID: 0030361788     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)