Resistance degradation of CVD (Ba,Sr)TiO3 thin films for DRAMs and integrated decoupling capacitors

IEEE International Symposium on Applications of Ferroelectrics

Volumn 1, Issue , 1996, Pages 51-54

  Basceri, C ^a   Wells, M A ^a   Streiffer, S K ^a   Kingon, A I ^a   Bilodeau, S ^a   Carl, R ^a   van Buskirk, P C ^a   Summerfelt, S R ^a   McIntyre, P ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; BARIUM TITANATE; DEGRADATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; RANDOM ACCESS STORAGE; STRONTIUM COMPOUNDS;

DYNAMIC RANDOM ACCESS MEMORY (DRAM);

THIN FILMS;

EID: 0030361045     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)