Review of SIMS techniques for characterization of ultra low energy ion implants

Proceedings of the International Conference on Ion Implantation Technology

Volumn , Issue , 1996, Pages 599-602

  Smith, Stephen P ^a   Chia, Victor K F ^a   Hitzman, Charles J ^a   Mount, Gary ^a  

^a CHARLES EVANS AND ASSOCIATES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMPURITIES; ION BEAMS; ION BOMBARDMENT; SECONDARY ION MASS SPECTROMETRY; SPUTTERING;

LOW ENERGY ION IMPLANTS; OXYGEN FLOODING; PRIMARY ION BEAM EQUILIBRATION;

ION IMPLANTATION;

EID: 0030360997     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)