Study of piezoelectric effect in GaN thin films using a modified Michelson interferometer

Conference on Optoelectronic & Microelectronic Materials and Devices, Proceedings, COMMAD

Volumn , Issue , 1996, Pages 329-332

  Muensit, S ^a   Wilson, D ^a   Guy, I L ^a  

^a MACQUARIE UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM NITRIDE FILMS; MICHELSON INTERFEROMETERS;

CALIBRATION; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; INTERFEROMETERS; PIEZOELECTRICITY; SEMICONDUCTING GALLIUM ARSENIDE; SUBSTRATES; THIN FILMS;

SEMICONDUCTING FILMS;

EID: 0030360268     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)