Enhanced field emission from polysilicon emitters using porous silicon

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1996, Pages 211-214

  Pullen, S E ^a   Huang, M ^a   Huq, S E ^a   Boswell, E C ^a   Prewett, P D ^a   Smith, G D W ^a   Wilshaw, P R ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; DRY ETCHING; ELECTRON EMISSION; POROUS SILICON; SINGLE CRYSTALS;

POLYSILICON EMITTERS; VOLTAGE REDUCTION;

FIELD EMISSION CATHODES;

EID: 0030358956     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)