Electrical properties of Pb(Zr,Ti)O3 thin films on Ir and IrO2 electrodes by MOCVD

IEEE International Symposium on Applications of Ferroelectrics

Volumn 1, Issue , 1996, Pages 471-474

  Shimizu, Masaru ^a   Okino, Hirotake ^a   Fujisawa, Hironori ^a   Shiosaki, Tadashi ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CRYSTAL STRUCTURE; CURRENT DENSITY; ELECTRODES; IRIDIUM; IRIDIUM COMPOUNDS; LEAKAGE CURRENTS; MAGNETRON SPUTTERING; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY; SEMICONDUCTING LEAD COMPOUNDS; X RAY CRYSTALLOGRAPHY;

LEAD ZIRCONATE TITANATE (PZT);

THIN FILMS;

EID: 0030358684     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)