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Volumn 13, Issue 8, 1996, Pages 610-612
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Thermal conductivity of diamond-based silicon-on-insulator structures
a a a a b b c c |
Author keywords
[No Author keywords available]
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Indexed keywords
DIAMOND FILMS;
PLASMA CVD;
SILICON ON INSULATOR TECHNOLOGY;
SILICON WAFERS;
SINGLE CRYSTALS;
THERMAL CONDUCTIVITY;
CHEMICAL VAPOR DEPOSITION METHODS;
DIAMONDS FILMS;
GASEOUS MIXTURE;
ION BEAM POLISHING;
LAYER THICKNESS;
MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITIONS;
SI LAYER;
SILICON ON INSULATOR STRUCTURES;
SINGLE-CRYSTAL SI;
THINNINGS;
ION BEAMS;
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EID: 0030356732
PISSN: 0256307X
EISSN: None
Source Type: Journal
DOI: 10.1088/0256-307X/13/8/014 Document Type: Article |
Times cited : (3)
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References (5)
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