KOH wet etching techniques for the micromachining of (100) SOI wafers

Conference on Optoelectronic & Microelectronic Materials and Devices, Proceedings, COMMAD

Volumn , Issue , 1996, Pages 454-457

  Rosa, M A ^a   Dimitrijev, S ^a   Harrison, H B ^a  

^a GRIFFITH UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

POTASSIUM HYDROXIDE; WET ETCHING;

DRY ETCHING; MICROMACHINING; POTASSIUM COMPOUNDS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

ETCHING;

EID: 0030356714     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)