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Volumn 355, Issue 2, 1996, Pages 129-134

Quantification of antimony depth profiles in Sb-doped tin dioxide thin films

Author keywords

[No Author keywords available]

Indexed keywords

MASS SPECTROMETRY; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTOR MATERIALS; THIN FILMS;

ANTIMONY ADDITION; ATOMIC LAYER METHOD; CHECK; DEPOSITION PROCESS; DEPTH PROFILE; MULTICOMPONENT ANALYSIS; TIN OXIDE;

CHEMICAL ANALYSIS;

EID: 0030355596 PISSN: 09370633 EISSN: None Source Type: Journal
DOI: 10.1007/s0021663550129 Document Type: Article

Times cited : (12)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.