Flow behavior through microfluidic valves

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 59, Issue , 1996, Pages 221-224

  Jiang, X N ^a   Zhou, Z Y ^a   Li, Y ^a   Yang, Y ^a   Ye, X Y ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSERS (FLUID); FLOW CONTROL; MICROELECTROMECHANICAL DEVICES; NOZZLES; REGRESSION ANALYSIS; SILICON;

FLOW RESISTANCE RATIO; SILICON MICROVALVES;

VALVES (MECHANICAL);

EID: 0030352650     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)

1. Shoji, S., and Esashi, M., 1994, "Microflow Devices and Systems", J. Micromech. Microeng. 4, pp. 157-171.
2. Esashi, M., 1990, "Integrated Micro Flow Control Systems", Sensors and Actuators, A321-A23, pp 161-167.
3. Yang, Y., Ye, X. Y., Zhou, Z. Y., Fang, W., and Li, Y., 1995, "A Thermally Actuated Micropump", Transducers'95, Stockholm, Sweden, June25-29, 1995, Late News Contributions, pp81-82.
4. Schomburg, and Scherrer, 1992, "3.5μm Thin Valves in Titanium membranes", J. Micromech. Microeng., 2pp. 184-186.
5. Stemme, E., and Stemme, G., 1993, "A Novel Piezoelectric Valveless Fluid Pump", Transducers'93, Yokohama, Japan, June 7-10, 1993, pp110-113.
6. Jiang, X. N., Zhou, Z. Y., Yao, J., Li, Y., and Ye, X. Y., 1995, "Microfluid Flow in Microchannel", Transducers'95, Stockholm, Sweden, June 25-29, 1995, Vol.2,pp317-320.
7. Gravesen, P., Branebjerg, J., and Jensen, O.S., 1993, "Microfluidics - a Review", J. Micromech. Microeng., 3 pp. 168-182.
8. White, F. M., 1974, "Viscous Fluid Flow", McGraw-Hill, New York.