Silicon bulk micromachined vibratory gyroscope for microspacecraft

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2810, Issue , 1996, Pages 101-115

  Tang, Tony K ^a   Gutierrez, Roman C Mr ^a   Wilcox, Jaroslava Z ^a   Stell, Christopher ^a   Vorperian, Vatche ^a   Dickerson, Mike ^a   Goldstein, Barry ^a   Savino, Joseph L ^a   Li, Wen J ^a   Calvet, Robert J ^a   Charkaborty, Indrani ^a   Bartman, Randall K ^a   Kaiser, William J ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATTITUDE CONTROL; MICROGYROSCOPES; MICROSPACECRAFT;

ACTUATORS; DESIGN; MICROMACHINING; NAVIGATION; SEMICONDUCTING SILICON; SPACE FLIGHT; VIBRATIONS (MECHANICAL);

GYROSCOPES;

EID: 0030352351     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)