Patterning and electrical testing of field emission arrays with novel emitter geometries

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1996, Pages 542-546

  Karpov, L D ^a   Genelev, A P ^a   Mirgorodski, Y V ^a   Tikhonski, A N ^a  

^a SI Diamond Technology Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COATINGS; COPPER; DENSITY (SPECIFIC GRAVITY); SEMICONDUCTOR DEVICE MANUFACTURE; SILICON CARBIDE; TITANIUM;

COPPER MICROTIPS; FIELD EMISSION ARRAYS;

FIELD EMISSION CATHODES;

EID: 0030350083     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)