Pulsed laser deposition of diamond-like carbon thin films: ablation dynamics and growth

Materials Research Society Symposium - Proceedings

Volumn 438, Issue , 1996, Pages 593-598

  Yang, Peidong ^a   Zhang, Z John ^a   Hu, Jiangtao ^a   Lieber, Charles M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRONIC DENSITY OF STATES; FILM GROWTH; LASER ABLATION; MASS SPECTROMETRY; PULSED LASER APPLICATIONS; THIN FILMS;

DIAMOND LIKE CARBON THIN FILM; KINETIC ENERGY DISTRIBUTION; LASER POWER DENSITY; PULSED LASER DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0030349226     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-438-593     Document Type: Conference Paper

References (14)