Monte carlo simulation of electron backscattering in solids using a general-purpose computer code

Scanning Microscopy

Volumn 10, Issue 3, 1996, Pages 625-638

  Acosta, E ^a   Coleoni, E ^a   Castellano, G ^a   Riveros, J A ^a   Fernandez Varea J M ^b   Salvat, F ^a,b  

^a UNIVERSIDAD NACIONAL DE CÓRDOBA   (Argentina)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Backscattering coefficient; Elastic scattering; Electron backscattering; Energy distributions; Energy straggling; Inelastic scattering; Monte Carlo simulation; Multiple scattering; Tilted specimens

Indexed keywords

ARTICLE; COMPUTER SIMULATION; ELECTRON; ELECTRON MICROSCOPY; ENERGY; MICROSCOPY; PRIORITY JOURNAL; SYSTEM ANALYSIS;

EID: 0030316477     PISSN: 08917035     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (46)

1. Archard G (1961). Backscattering of electrons. J. Appl. Phys. 32, 1505-1509.
2. Baró J, Sempau J, Fernández-Varea JM, Salvat F (1994). Simplified Monte Carlo simulation of elastic electron scattering in limited media. Nucl. Instrum. Meth. B 84, 465-483.
3. Baró J, Sempau J, Fernández-Varea JM, Salvat F (1995). Penelope: An algorithm for Monte Carlo simulation of the penetration and energy loss of electrons and positrons in matter. Nucl. Instrum. Meth. B 100, 31-46.
4. Berger MJ (1963). Monte Carlo calculation of the penetration and diffusion of fast charged particles. In: Methods in Computational Physics, vol. 1. Alder B, Fernbach S, Rotenberg M (eds.). Academic Press, New York. pp. 135-215.
5. Berger MJ, Seltzer SM (1982). Stopping Powers and Ranges of Electrons and Positrons. NBSIR 82-2550-A. National Bureau of Standards, Gaithersburg, MD. Also available as ICRU report 37 (1984), International Commission on Radiation Units and Measurements, Bethesda, MD.
6. Berger MJ, Seltzer SM (1988). The ETRAN system. In: Monte Carlo Transport of Electrons and Photons. Jenkins TM, Nelson WR, Rindi A (eds.). Plenum Press, New York. Chapters 7-9, pp. 153-246.
7. Bielajew AF, Rogers D (1987). PRESTA: The parameter reduced electron-step transport algorithm for electron Monte Carlo transport. Nucl. Instrum. Meth. B 18, 165-181.
8. Bielajew AF, Rogers D (1988). Variance-reduction techniques. In: Monte Carlo of Electrons and Photons. Jenkins TM, Nelson WR, Rindi A (eds.). Plenum Press, New York. Chapter 18, pp. 407-419.
9. Cosslett V, Thomas R (1965). Multiple scattering of 5-30 keV electrons in evaporated metal films III: Backscattering and absorption. Br. J. Appl. Phys. 16, 779-795.
10. Darlington E (1975). Backscattering of 10-100 keV electrons from thick targets. J. Phys. D: Appl. Phys. 8, 85-93.
11. Drescher H, Reimer L, Seidel H (1970). Backscattering and secondary electron emission of 10 to 100 keV electrons and correlations to scanning electron microscopy. Z. Angew. Phys. 29, 331-336.
12. Everhart T (1960). Simple theory concerning the reflection of electrons from solids. J. Appl. Phys. 31, 1483-1490.
13. Fathers D, Rez P (1979). A transport equation theory of electron backscattering. Scanning Electron Microsc. 1979; I, 55-66.
14. Fernández-Varea JM, Martínez JD, Salvat F (1991). A simplified method for the detailed Monte Carlo simulation of electron transport. J. Phys. D: Appl. Phys. 24, 814-826.
15. Fernández-Varea JM, Mayol R, Baró J, Salvat F (1993). On the theory and simulation of multiple elastic scattering of electrons. Nucl. Instrum. Meth. B 73, 447-473.
16. Fernández-Varea JM, Liljequist D, Csillag S, Räty R, Salvat F (1996). Monte Carlo simulation of 0.1-100 keV electron and positron transport in solids using optical data and partial wave methods. Nucl. Instrum. Meth. B 108, 35-50.
17. Heinrich KFJ, Newbury DE (eds.) (1991). Electron Probe Quantitation. Plenum Press, New York. pp. 177-190.
18. Hunger H, Küchler L (1979). Measurements of the electron backscattering coefficient for quantitative electron probe microanalysis in the energy range of 4 to 40 keV. Phys. Stat. Sol. (a) 56, K45-K48.
19. Inokuti M (1971). Inelastic collisions of fast charged particles with atoms and molecules-the Bethe theory revisited. Rev. Mod. Phys. 43, 297-347.
20. Jenkins TM, Nelson WR, Rindi A (eds.) (1988). Monte Carlo Transport of Electrons and Photons. Plenum Press, New York. Chapters 7-14.
21. Kalos MH, Whitlock PA (1986). Monte Carlo Methods, vol. 1. Wiley, New York. Chapter 6.
22. Kanter H (1957). On the backscattering of electrons in the energy range from 10 to 100 keV. Ann. Phys. 20, 144-166.
23. Lederer CM, Shirley VS (eds.) (1978). Tables of Isotopes, 7th edition. Wiley, New York. Appendix III.
24. Liljequist D (1983a). A discussion of the parameters of primary importance in plural and multiple electron scattering and energy loss. Scanning Electron Microsc. 1983; III, 1019-1033.
25. Liljequist D (1983b). A simple calculation of inelastic mean free path and stopping power for 50 eV-50 keV electrons in solids. J. Phys. D: Appl. Phys. 16, 1567-1582.
26. Llovet X, Riveros JA, Salvat F (1996). Application of a new Monte Carlo simulation algorithm to electron probe microanalysis. Mikrochim. Acta (in press).
27. Martínez JD, Mayol R, Salvat F (1990). Monte Carlo simulation of kilovolt electron transport in solids. J. Appl. Phys. 67, 2955-2964.
28. Massoumi G, Hozhabri N, Lennard W, Schultz P (1991). Doubly differential positron backscattering yields. Phys. Rev. B 44, 3486-3489.
29. Matsukawa T, Shimizu R, Hashimoto H (1974). Measurements of the energy distribution of backscattered kilovolt electrons with a spherical retarding-field energy analyser. J. Phys. D: Appl. Phys. 7, 695-702.
30. Merlet C, Jbara O, Rondot S, Cazaux J (1992). Auger backscattering factor at primary beam energies above 10 keV. Surf. Interf. Anal. 19, 192-196.
31. Nakhodin N, Ostroukhov A, Romanovskii V (1962). Electron inelastic scattering in thin films. Soviet Physics-Solid State 4, 1112-1119.
32. Nelson WR, Hirayama H, Rogers DWO (1985). The EGS4 Code System. Stanford Linear Accelerator Center Report No. SLAC-265. Stanford, California.
33. Neubert G, Rogaschewski S (1980). Backscattering coefficient measurements of 15-60 keV electrons in solids at various angles of incidence. Phys. Stat. Sol. (a) 59, 35-41.
34. Neubert G, Rogaschewski S (1984). Measurements of the back-scattering and absorption of 15-60 keV electrons for transparent solid films at various angles of incidence. J. Phys. D: Appl. Phys. 17, 2439-2454.
35. Niedrig H (1981). Simple theoretical models for electron backscattering from solid films. Scanning Electron Microsc. 1981; I, 29-45.
36. Niedrig H (1982). Electron backscattering from thin films. J. Appl. Phys. 53, R15-R49.
37. Niedrig H, Sieber P (1971). Backscattering of fast electrons by thin foils. Z. Angew. Phys. 31, 27-37.
38. Reimer L, Krefting E (1976). The effect of scattering models on the results of Monte Carlo calculations. In: Proceedings of the Workshop on Use of Monte Carlo Calculations in Electron Probe Microanalysis and Scanning Electron Microscopy, Gaithersburg. NBS Special Publ. 460. US Gov. Printing Office, Washington DC [now available from National Technical Information Service (NTIS), Alexandria, VA], pp. 45-60.
39. Salvat F, Fernández-Varea JM (1992). Semiempirical cross sections for the simulation of the energy loss of electrons and positrons in matter. Nucl. Instrum. Meth. B 63, 255-269.
40. Salvat F, Mayol R (1993). Elastic scattering of electrons and positrons by atoms. Schrödinger and Dirac partial wave analysis. Comput. Phys. Commun. 74, 358-374.
41. Salvat F, Martinez JD, Mayol R, Parellada J (1987). Analytical Dirac-Hartree-Fock-Slater screening functions for atoms (Z = 1-92). Phys. Rev. A 36, 467-474.
42. Seidel H (1972). Measurements of backscattering and transmission coefficients of poly-crystalline materials and on the orientation dependence of the backscattering coefficient and of the secondary electron yield for 9 to 100 keV electrons. Doctoral Thesis, University of Münster. Germany.
43. Shimizu R, Murata K (1971). Monte Carlo calculations of the electron-sample interactions in the scanning electron microscope. J. Appl. Phys. 42, 387-394.
44. Sternheimer RM (1952). The density effect for the ionization loss in various materials. Phys. Rev. 88, 851-859.
45. Sternheimer RM, Berger MJ, Seltzer SM (1984). Density effect for the ionization loss of charged particles in various substances. Atom. Data Nucl. Data Tables 30, 261-271.
46. Thümmel H (1974). Passage of Electrons and Beta Rays Through Films of Matter. Akademie-Verlag, Berlin, German Democratic Rep. Chapters 9-11.