Development and evaluation of on-line detection techniques for polar organics in ultrapure water

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

Volumn , Issue , 1996, Pages 355-362

  Frye, Gregory C ^a   Blair, Dianna S ^a   Schneider, Thomas W ^a   Mowry, Curtis D ^a   Colburn, Chris W ^a   Donovan, Robert P ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; ACOUSTIC SURFACE WAVE DEVICES; CHEMICAL SENSORS; GAS CHROMATOGRAPHY; ONLINE SYSTEMS; WATER ANALYSIS; WATER RECYCLING;

ION MOBILITY SPECTROSCOPY; ULTRAPURE WATER (UPW);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030316091     PISSN: 00739227     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)