Raman, X-ray and electrical properties of MOD PZT/PLZT thin films

Integrated Ferroelectrics

Volumn 12, Issue 2-4, 1996, Pages 167-175

  Zhu, W ^a   Tse, M S ^a   Lu, W ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

AFM; Dielectric properties; MOD process; PZT film; Raman scattering; Structural transformation

Indexed keywords

ATOMIC FORCE MICROSCOPY; FERROELECTRICITY; FILM GROWTH; LEAD COMPOUNDS; MATHEMATICAL MODELS; ORGANOMETALLICS; PHASE TRANSITIONS; RAMAN SCATTERING; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

LEAD ZIRCONATE TITANATE; ROSETTE GROWTH MODEL;

DIELECTRIC FILMS;

EID: 0030313851     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589608013060     Document Type: Article

References (18)

1. Scott, J. F. and Paz de Araujo, C. A. (1989). Science, 246, 1400.
2. Evans, J. T. and Womack, R. (1988). IEEE J. Solid-State Circuits, 23, 1171.
3. Moazzami, R. and Hu, C. (1992). IEEE Trans. Electronic Devices, 39, 2044.
4. Vest, R. W. and Zhu, W. (1991). Ferroelectrics, 119, 61.
5. Tuttle, B. A., Headley, T. J., Bunker, B. C., Schwartz, R. W., Zender, T. J., Hernandez, C. L., Goodnow, D. C., Tissot, R. J. and Michael, J. (1992). J. Mater. Res., 7, 1876.
6. Cuppens, R., Larsen, P. K. and Spierings, G. A. C. M. (1992). Microelectronic Engineering, 19, 245.
7. Shiosaki, T. and Shimizu, M. (1993). Integrated Ferroelectrics, 9, 13.
8. Peng, C. H. and Desu, S. B. (1992). Appl. Phys. Lett., 61, 1.
9. Budd, K. D., Dey, S. K. and Payne, D. A. (1985). Proc. Brit. Ceram. Soc., 36, 107.
10. Zhu, W., Vest, R. W., Tse, M. S., Rao, M. K. and Liu, Z. Q. (1994). J. Mater. Sci.: Materials in Electronics, 5, 173.
11. Jaffe, B., Roth, R. S. and Marzullo, S. (1955). J. Res. NBS, 55, 239.
12. Shirane, G. and Suzuki, K. (1952). J. Phys. Soc. Japan, 7, 333.
13. Taguchi, I., Pignolet, A., Wang, L., Proctor, M., Levy, F. and Schmid, P. E. (1993). J. Appl. Phys., 73, 394.
14. Burns, G. and Scott, B. A. (1970). Phys. Rev. Lett., 25, 1191.
15. Cullity, B. D. (1978). Elements of X-ray Diffraction, 2nd Edition, Addison-Wesley, Menlo Park.
16. Schwartz, L. H. and Cohen, J. B. (1977). Diffraction From Materials, Academic Press, New York.
17. Namba, Y. and Heidarpour, E. (1992). J. Appl. Phys., 72, 1748.
18. Zhu, W., Liu, Z. Q., Lu, W., Tse, M. S., Tan, H. S. and Yao, X. (1996). J. Appl. Phys., 79, 4283.