Process tool qualification and problem solving using SIMS, TXRF and ICP-MS

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

Volumn , Issue , 1996, Pages 152-159

  Carney, G F ^a   Briehl, B ^a   Lu, S ^a   Anderson, T A ^a   Evans, K L ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLEANING; CONTAMINATION; SECONDARY ION MASS SPECTROMETRY; SILICON WAFERS;

INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRY (ICP MS); TOTAL REFLECTION X RAY FLUORESCENCE (TXRF);

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0030313694     PISSN: 00739227     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)