IR laser induced decomposition of tetrakis( dimethylamido) titanium for chemical vapor deposition of TiNx

Infrared Physics and Technology

Volumn 37, Issue 7, 1996, Pages 727-731

  Janovska M ^a   Bastl, Z ^a  

^a J HEYROVSKÝ INSTITUTE OF PHYSICAL CHEMISTRY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE LASERS; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; INFRARED RADIATION; LASER BEAM EFFECTS; ORGANIC COMPOUNDS;

SOLID DEPOSITS;

TITANIUM NITRIDE;

EID: 0030313369     PISSN: 13504495     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1350-4495(96)00006-0     Document Type: Article

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