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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2726, Issue , 1996, Pages 262-272

Fast marching level set methods for three-dimensional photolithography development

(1) Sethian, J A a

a UNIVERSITY OF CALIFORNIA (United States)

Author keywords

Eikonal equation; Fast marching method; Level set techniques; Photoresist development

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; COMPUTER SOFTWARE; COMPUTER VISION; ETCHING; FINITE DIFFERENCE METHOD; GEODESY; HAMILTONIANS; PHOTORESISTS; THREE DIMENSIONAL COMPUTER GRAPHICS;

FAST MARCHING METHOD;

PHOTOLITHOGRAPHY;

EID: 0030313115 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.240962 Document Type: Conference Paper

Times cited : (68)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.