SCOPUS 정보 검색 플랫폼

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2726, Issue , 1996, Pages 71-81

Signamization

Author keywords

; Annular illumination; Engineering programming; Imaging enhancement; k1 reduction; Lithography; NA; Phase shifting mask; Stepper optimization; Steppers

Indexed keywords

COMPUTER PROGRAM LISTINGS; MASKS; OPTIMIZATION; PHASE SHIFT; PROJECTION SYSTEMS;

SIGNAMIZATION;

LITHOGRAPHY;

EID: 0030313058 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.240965 Document Type: Conference Paper

Times cited : (5)

References (7)

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2
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- Lin, B.J.¹

3
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- (1992) Microelectronic Engineering , vol.17 , pp. 79
- Lin, B.J.¹

4
- 0010284139
- U.S. Patent 4,890,309
- Smith, H.I.¹ Anderson, E.H.² Schattenburg, M.L.³

5
- 0010231922
- Jan
- (1992) Solid State Technology , pp. 43
- Lin, B.J.¹

6
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- (1992) SPIE Proceedings , vol.1674 , pp. 741
- Shiraishi, N.¹ Hirukawa, S.² Takeuchi, Y.³ Magome, N.⁴

7
- 85075600694
- (1992) SPIE Proceedings , vol.1674 , pp. 92
- Noguchi, M.¹ Muraki, M.² Iwasaki, Y.³ Suzuki, A.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.