High performance laser diode integrated with monitoring photodiode (LD+PD) fabricated with the precisely controlled dry etching technique

European Conference on Optical Communication, ECOC

Volumn 5, Issue , 1996, Pages

  Shiba, T ^a   Funaba, S ^a   Nakayama, T ^a   Ishimura, E ^a   Takagi, K ^a   Sakaino, T ^a   Aoyagi, T ^a   Nagahama, K ^a   Aiga, M ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; DRY ETCHING; FABRICATION; LIGHT ABSORPTION; LIGHT REFLECTION; MATHEMATICAL MODELS; PHOTODIODES; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR LASERS; SEMICONDUCTOR QUANTUM WELLS;

BEAM DIVERGENCE; MULTIPLE QUANTUM WELLS; TWO DIMENSIONAL;

INTEGRATED OPTOELECTRONICS;

EID: 0030312591     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)