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Volumn 12, Issue 1, 1996, Pages 23-31

Electrical characterization of SrBi2Ta2O9 thin films for ferroelectric non-volatile memory applications

Author keywords

[No Author keywords available]

Indexed keywords

BISMUTH COMPOUNDS; CHEMICAL VAPOR DEPOSITION; ELECTRIC PROPERTIES; FERROELECTRIC DEVICES; OXIDES; POLARIZATION; TANTALUM COMPOUNDS; THIN FILMS;

EID: 0030312195     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589608225745     Document Type: Article
Times cited : (6)

References (23)
  • 1
    • 0000627945 scopus 로고
    • B. Aurivillius, Arkiv Kemi, 1, 463 (1950); 1, 499 (1950); 2, 519 (1951).
    • (1950) Arkiv Kemi , vol.1 , pp. 463
    • Aurivillius, B.1
  • 2
    • 0000627946 scopus 로고
    • B. Aurivillius, Arkiv Kemi, 1, 463 (1950); 1, 499 (1950); 2, 519 (1951).
    • (1950) Arkiv Kemi , vol.1 , pp. 499
  • 3
    • 0001519835 scopus 로고
    • B. Aurivillius, Arkiv Kemi, 1, 463 (1950); 1, 499 (1950); 2, 519 (1951).
    • (1951) Arkiv Kemi , vol.2 , pp. 519
  • 5
    • 8344244478 scopus 로고    scopus 로고
    • G. A. Smolenskii, V. A. Isupov, and A. I. Agranovskaya, Fiz. Tverdogo Tela. 1, 1562 (1959) [Soviet Physics-Solid State, Vol. 1, p. 1429].
    • Soviet Physics-Solid State , vol.1 , pp. 1429
  • 9
    • 8344258258 scopus 로고    scopus 로고
    • G. A. Smolenskii, V. A. Isupov, and A. I. Agranovskaya, Fiz. Tverdogo Tela. 3, 895 (1961) [Soviet Physics-Solid State, Vol. 3, p. 651].
    • Soviet Physics-Solid State , vol.3 , pp. 651
  • 19
    • 8344238167 scopus 로고    scopus 로고
    • note
    • Film thickness measurements were based on calibrated cross-sectional SEM measurements with optical thickness measurements used for secondary measurements. The cross-sectional SEMs showed roughly spherical grains with typical dimensions of several tens of nm. This granular microstructure resulted in a relatively rough upper film surface. No columnar grain structures were observed. X-ray diffraction patterns suggested a random orientation of the grains.
  • 22
    • 8344288142 scopus 로고    scopus 로고
    • note
    • The pulse polarization measurements used the signal train of triangular pulses shown as "Polarization Measurement" in Figure 2 (up-down-dwell-up-down-dwell-up-dwell-down-up-dwell-down). The period of a bipolar pulse was 10 sec (i.e. 100 kHz). The dwell time between measurement pulses within the measurement train was on the order of 1 sec which allows for measurement of relaxation.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.