Optimizing the growth of PECVD silicon nitride films for solar cell applications using neural networks and genetic algorithms

Intelligent Engineering Systems Through Artificial Neural Networks

Volumn 6, Issue , 1996, Pages 343-349

  Han, Seung Soo ^a   Cai, Li ^a   Rohatgi, Ajeet ^a   May, Gary ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; GENETIC ALGORITHMS; NEURAL NETWORKS; OPTIMIZATION; PLASMA SPRAYING; SOLAR CELLS;

SILICON NITRIDE;

EID: 0030308850     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (15)

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