Automatic defect classification for effective yield management

Solid State Technology

Volumn 39, Issue 12, 1996, Pages

  Breaux, Louis ^a   Kolar, David ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; FACTORY AUTOMATION; ONLINE SYSTEMS; PROCESS CONTROL;

AUTOMATIC DEFECT CLASSIFICATION (ADC);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030308805     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (0)