Steady state growth conditions in ion assisted or induced planar thin film deposition

Thin Solid Films

Volumn 289, Issue 1-2, 1996, Pages 121-128

  Carter, G ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

Deposition rate; Impurities; Ion bombardment

Indexed keywords

COMPOSITION; FILM GROWTH; IMPURITIES; ION BOMBARDMENT; IONS; MATHEMATICAL MODELS; THIN FILMS;

CONCENTRATION RATIOS; DEPOSITION RATE; DEPTH INDEPENDENT COMPOSITION; FRAGMENTATION; MULTICOMPONENT INCIDENT FLUXES; THIN FILM GROWTH RATE;

DEPOSITION;

EID: 0030289314     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08886-4     Document Type: Article

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