Integrated optic head for sensing a two-dimensional displacement of a grating scale

Applied Optics

Volumn 35, Issue 31, 1996, Pages 6261-6266

  Ura, Shogo ^a   Endoh, Toshiaki ^a,b   Suhara, Toshiaki ^a   Nishihara, Hiroshi ^a  

^a OSAKA UNIVERSITY   (Japan)

^b Device Development Center   (Japan)

Author keywords

Displacement sensor; Grating coupler; Integrated optic sensor; Integrated optics; Optical interferometer; Thin film waveguide

Indexed keywords

CALCULATIONS; DIFFRACTION GRATINGS; ELECTRIC FIELDS; INTEGRATED OPTICS; INTERFEROMETERS; LIGHT INTERFERENCE; PHOTODIODES; SILICON; THIN FILMS; WAVEGUIDE COUPLERS;

ELECTRON BEAM DIRECT WRITING TECHNIQUE; INTEGRATED OPTIC SENSORS; LINEARLY FOCUSING GRATING COUPLERS; PHASE RETARDATION; TWO DIMENSIONAL;

OPTICAL SENSORS;

EID: 0030289168     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.006261     Document Type: Article

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