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Volumn 7, Issue 11, 1996, Pages 1563-1566

Two-step method without harmonics suppression in error separation

Author keywords

[No Author keywords available]

Indexed keywords

HARMONIC ANALYSIS; IMPROVEMENT; PRECISION ENGINEERING; SENSORS; SIGNAL PROCESSING;

EID: 0030288314     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/7/11/003     Document Type: Article
Times cited : (24)

References (6)
  • 1
    • 0000720857 scopus 로고
    • Some theoretical aspects of error separation methods in surface metrology
    • Whitehouse D J 1976 Some theoretical aspects of error separation methods in surface metrology J. Phys. E: Sci. Instrum. 9 531-6
    • (1976) J. Phys. E: Sci. Instrum. , vol.9 , pp. 531-536
    • Whitehouse, D.J.1
  • 3
    • 3643084260 scopus 로고
    • Discussion of several problems in error separation
    • Ye Jingsheng 1992 Discussion of several problems in error separation Acta Metrol. Sinica 13 170-5
    • (1992) Acta Metrol. Sinica , vol.13 , pp. 170-175
    • Ye, J.1
  • 5
    • 4344621232 scopus 로고
    • Mixed multi-step method
    • Wang Hong 1994 Mixed multi-step method Acta Metrol. Sinica 15 223-5
    • (1994) Acta Metrol. Sinica , vol.15 , pp. 223-225
    • Wang, H.1
  • 6
    • 0027001712 scopus 로고
    • Full-harmonic error separation technique
    • Cao Linxiang 1992 Full-harmonic error separation technique Meas. Sci. Technol. 3 1129
    • (1992) Meas. Sci. Technol. , vol.3 , pp. 1129
    • Cao, L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.