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Volumn 43, Issue 11, 1996, Pages 1812-1817

Enhancement of fmax in InP/InGaAs HBT's by selective MOCVD growth of heavily-doped extrinsic base regions

Author keywords

[No Author keywords available]

Indexed keywords

CIRCUIT OSCILLATIONS; ELECTRIC RESISTANCE; EQUIVALENT CIRCUITS; FILM GROWTH; INTERFACES (MATERIALS); METALLORGANIC CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DOPING;

EID: 0030287462     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.543012     Document Type: Article
Times cited : (13)

References (15)
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    • (1990) , pp. 673-676
    • Nakajima, O.1    Ito, H.2    Nittono, T.3    Nagata, K.4
  • 3
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    • H. Shimawaki Y. Amamiya N. Furuhata K. Honjo High- $f_{\rm{\max}}$ AlGaAs/InGaAs and AlGaAs/GaAs HBT's with p $^+{/}$ p regrown base contacts IEEE Trans. Electron Devices 42 10 1735 1743 1995 16 9729 464425
    • (1995) , vol.42 , Issue.10 , pp. 1735-1743
    • Shimawaki, H.1    Amamiya, Y.2    Furuhata, N.3    Honjo, K.4
  • 4
    • 0028467754 scopus 로고
    • T. Kobayashi M. Ida K. Kurishima Effects of susceptor rotation speed and total flow rate on selectivity in metalorganic chemical vapor deposition growth techniques J. Crystal Growth 140 432 434 1994
    • (1994) , vol.140 , pp. 432-434
    • Kobayashi, T.1    Ida, M.2    Kurishima, K.3
  • 5
    • 85176675775 scopus 로고
    • VA, Charlottesville
    • M. Ida S. Yamahata K. Kurishima H. Ito T. Kobayashi Y. Matsuoka High- $f_{\\rm{\\max}}$ InP/InGaAs HBT's with extrinsic base layers selectively grown by MOCVD 53rd IEEE Device Research Conf. 1995 VA, Charlottesville 3596 10711 496278
    • (1995)
    • Ida, M.1    Yamahata, S.2    Kurishima, K.3    Ito, H.4    Kobayashi, T.5    Matsuoka, Y.6
  • 6
    • 0024910851 scopus 로고
    • E. Tokumitsu A. G. Dentai C. H. Joyner Reduction of the surface recombination current in InGaAs/InP pseudo-heterojunction bipolar transistors using a thin InP passivation layer IEEE Electron Device Lett. 10 585 587 1989 55 1651 43148
    • (1989) , vol.10 , pp. 585-587
    • Tokumitsu, E.1    Dentai, A.G.2    Joyner, C.H.3
  • 7
    • 0000002789 scopus 로고
    • K. Kurishima T. Kobayashi U. Gsele Abnormal redistribution of Zn in InP/InGaAs heterojunction bipolar transistor structures Appl. Phys. Lett. 60 2496 2498 1992
    • (1992) , vol.60 , pp. 2496-2498
    • Kurishima, K.1    Kobayashi, T.2    Gsele, U.3
  • 8
    • 0029273559 scopus 로고
    • Y. Betser D. Ritter High emitter efficiency in InP/GaInAs HBT's with ultra high base doping levels IEEE Electron Device Lett. 16 97 99 1995 55 8326 363237
    • (1995) , vol.16 , pp. 97-99
    • Betser, Y.1    Ritter, D.2
  • 9
    • 0029373658 scopus 로고
    • Y. Matsuoka E. Sano InP/InGaAs double-heterostructure bipolar transistors for high-speed IC's and OEIC's Solid-State Electron. 38 1703 1709 1995
    • (1995) , vol.38 , pp. 1703-1709
    • Matsuoka, Y.1    Sano, E.2
  • 10
    • 33748016985 scopus 로고
    • W. S. Hobson S. J. Pearton A. S. Jordan Redistribution of Zn in GaAs-AlGaAs heterojunction bipolar transistor structures Appl. Phys. Lett. 56 1251 1253 1990
    • (1990) , vol.56 , pp. 1251-1253
    • Hobson, W.S.1    Pearton, S.J.2    Jordan, A.S.3
  • 11
    • 0027578431 scopus 로고
    • M. Ida K. Kurishima T. Kobayashi Selective InGaAs growth at low temperature by metalorganic chemical vapor deposition (MOCVD) with high-speed rotating susceptor J. Crystal Growth 129 783 785 1993
    • (1993) , vol.129 , pp. 783-785
    • Ida, M.1    Kurishima, K.2    Kobayashi, T.3
  • 12
    • 0028762094 scopus 로고
    • M. Ida K. Kurishima T. Kobayashi Highly selective InGaAs growth by metalorganic chemical vapor deposition with a high-speed rotating susceptor J. Crystal Growth 145 237 241 1994
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    • Ida, M.1    Kurishima, K.2    Kobayashi, T.3
  • 13
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    • P. M. Enquist Secondary ion mass spectroscopy depth profiles of heterojunction bipolar transistor emitter-base heterojunctions grown by low pressure MOVPE J. Crystal Growth 93 637 645 1988
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  • 14
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    • K. Zhang Y. C. Chen J. Singh P. Bhattacharya Reduction of Be out-diffusion from heavily doped GaAs:Be layers by pseudomorphic In $_X$ Ga $_{1-X}$ As barrier layers Appl. Phys. Lett. 65 872 874 1994
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    • Zhang, K.1    Chen, Y.C.2    Singh, J.3    Bhattacharya, P.4
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    • A. G. Milnes D. L. Feucht Heterojunctions and Metal-Semiconductor Junctions. 1972 Academic New York
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    • Milnes, A.G.1    Feucht, D.L.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.