Novel technology for hybrid integration of photonic and electronic circuits

IEEE Photonics Technology Letters

Volumn 8, Issue 11, 1996, Pages 1507-1509

  Matsuo, Shinji ^a   Nakahara, Tatsushi ^a   Tateno, Kouta ^a   Kurokawa, Takashi ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CMOS INTEGRATED CIRCUITS; HYBRID INTEGRATED CIRCUITS; INTEGRATED CIRCUIT LAYOUT; POLYIMIDES; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; SUBSTRATES; WSI CIRCUITS;

PHOTONIC CIRCUITS; PHOTORESPONSIVITY;

PHOTODETECTORS;

EID: 0030286896     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.541565     Document Type: Article

References (8)

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