Energy savings in cleanrooms from demand-controlled filtration

Journal of the Institute of Environmental Sciences

Volumn 39, Issue 6, 1996, Pages 21-27

  Faulkner, David ^a   Fisk, William J ^a   Walton, John T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Cleanroom; Demand controlled filtration; Energy savings; Particle counter

Indexed keywords

AIR FILTERS; ENERGY CONSERVATION; ENERGY UTILIZATION; FANS; INDOOR AIR POLLUTION; PARTICLES (PARTICULATE MATTER); REAL TIME SYSTEMS;

DEMAND CONTROL FILTRATION; OPTICAL PARTICLE COUNTER; PAYBACK PERIOD; RECIRCULATION AIRFLOW RATE;

CLEAN ROOMS;

EID: 0030286828     PISSN: 10522883     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (2)

1. FED-STD-209E, "Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones," (September 11, 1992).
2. Carr, P.E., Rapa, A.C., Fosnight, W.J., Baserman, R.J., and Cooper, D.W., "Measured Effects of Reduced Flow Velocity in a Laminar Flow Cleanroom," Journal of the Institute of Environmental Sciences, pp. 41-46 (May/June 1994).