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Materials Chemistry and Physics

Volumn 46, Issue 2-3, 1996, Pages 183-188

Rutherford backscattering spectrometry: Reminiscences and progresses

(2) Chu, W K a Liu, J R a

a University of Houston (United States)

Author keywords

Backscattering spectrometry; Ion beam analysis; RBS

Indexed keywords

ATOMIC PHYSICS; ION BEAMS; NUCLEAR PHYSICS; SEMICONDUCTOR MATERIALS; SOLID STATE PHYSICS; THIN FILMS;

ION BEAM ANALYSIS;

RUTHERFORD BACKSCATTERING SPECTROSCOPY;

EID: 0030286680 PISSN: 02540584 EISSN: None Source Type: Journal
DOI: 10.1016/S0254-0584(97)80012-0 Document Type: Article

Times cited : (14)

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