Comparative study of the atomic hydrogen interaction with Si(110)"4 × 6×-Al and Si(111)√3 × √3-Al surfaces

Surface Science

Volumn 366, Issue 3, 1996, Pages 501-507

  Khramtsova, E A ^a   Saranin, A A ^a   Ignatovich, K V ^a   Lifshits, V G ^a  

^a INSTITUTE OF AUTOMATION AND CONTROL PROCESSES   (Russian Federation)

Author keywords

Aluminium; Atom solid interactions; Auger electron spectroscopy; Hydrogen; Low energy electron diffraction (LEED); Silicon; Surface structure, morphology, roughness, and topography

Indexed keywords

AGGLOMERATION; ALUMINUM; ANISOTROPY; ANNEALING; AUGER ELECTRON SPECTROSCOPY; DIFFUSION IN SOLIDS; FILM GROWTH; HYDROGEN; LOW ENERGY ELECTRON DIFFRACTION; MORPHOLOGY; SURFACE ROUGHNESS;

ATOM SOLID INTERACTIONS;

SEMICONDUCTING SILICON;

EID: 0030286029     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/0039-6028(96)00826-6     Document Type: Article

References (16)

1. K. Oura, K. Sumitomo, T. Kobayashi, T. Kinoshita, Y. Tanaka and F. Shoji, Surf. Sci. 245 (1991) L460.
2. T. Kinoshita, Y. Tanaka, K. Sumitomo, F. Shoji, K. Oura and I. Katayama, Appl. Surf. Sci. 60/61 (1992) 183.
3. A.A. Saranin, E.A. Khramtsova and V.G. Lifshits, Surf. Sci. 297 (1993) 353.
4. H. Ohnishi, Y. Yamamoto, I. Katayama, Y. Ohba and K. Oura, Jpn. J. Appl. Phys. 33 (1994) L1106.
5. B.R. Williams, B.F. Mason, D.W. McComb, D.J. Moffatt and P.A. Hackett, Surf. Sci. 313 (1994) L790.
6. M. Naitoh, H. Ohnishi, Y. Ozaki, F. Shoji and K. Oura, Appl. Surf. Sci. 60/61 (1992) 190.
7. A.A. Saranin, E.A. Khramtsova and V.G. Lifshits, Surf. Sci. 302 (1994) 57.
8. E. Landemark, C.J. Karlsson and R.I.G. Uhrberg, Phys. Rev. B 44 (1991) 1950.
9. S. Mizzuno and A. Ichimiya, Appl. Surf. Sci. 33/34 (1988) 38.
10. K. Oura, Y. Tanaka, H. Morishita, F. Shoji and I. Katayama, Nucl. Instrum. Methods B 85 (1994) 439.
11. A.V. Zotov, E.A. Khramtsova, V.G. Lifshits, A.T. Kharchenko, S.V. Ryzhkov and A.N. Demidchik, Surf. Sci. 277 (1992) L77.
12. C.M. Greenlief, S.M. Gates and P.A. Holbert, J. Vac. Sci. Technol. A 7 (1989) 1845.
13. H. Kondoh, M. Hara, K. Domen and H. Nozoye, Surf. Sci. 268 (1992) L287.
14. Y.-W. Mo and M.G. Lagally, Surf. Sci. 248 (1991) 313.
15. Y.W. Mo, J. Kleiner, M.B. Webb and M.G. Lagally, Phys. Rev. Lett. 66 (1991) 1998.
16. Y.-W. Mo, J. Kleiner, M.B. Webb and M.G. Lagally, Surf. Sci. 268 (1992) 275.