Low-permittivity evaporated polymer-polyimide

Vacuum

Volumn 47, Issue 11, 1996, Pages 1345-1346

  Spassova, E ^a   Jivkov, I ^a   Danev, G ^a   Dimitrova, T ^b   Koprinarova, J ^b   Paskaleva, A ^b  

^a CENTRAL LABORATORY OF PHOTOPROCESSES   (Bulgaria)

^b INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; CAPACITORS; DIELECTRIC PROPERTIES OF SOLIDS; ELECTRIC CURRENT MEASUREMENT; ELECTRIC LOSSES; EVAPORATION; MICROELECTRONICS; PERMITTIVITY; POLYIMIDES; SILICON WAFERS; VACUUM DEPOSITED COATINGS; VOLTAGE MEASUREMENT;

EVAPORATED POLYMER POLYIMIDES;

DIELECTRIC FILMS;

EID: 0030285755     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(96)00181-9     Document Type: Article

References (9)

1. J Field, Solid State Technology, 37, 91 (1994).
2. P Singer, Semiconductor International, 12 , 34 (1994).
3. J R Salem, F O Sequeda, J Duran, W Y Lee and R M Yang, J Vac Sci Technol, A4(3), 369 (1986).
4. Y Takahashi, M Iijina, K Inagawa and A Itch, J Vac Sci Technol , A5(4), 2253 (1987).
5. M Grunze and R N Lamb, J Vac Sci Technol, A5(4), 1685 (1987).
6. P Kowalczyk, C D Dimitrakopoulos and S E Molis, Mater Res Soc Symp Proc, Pittsburgh, PA, 227, 55 (1991).
7. M O Aboelfotch, Phys Rev, B39 , 5070 (1989).
8. I Jivkov, T Tsvetanov, E Spassova and G Danev, 8th International School on Vacuum Electron and Ion Thechnologies, 28-30 September 1994, Sozopol, Bulgaria.
9. Lj Atanasoska, St G Anderson, H M Meyer and J H Weaver, Vacuum, 40, 85 (1990).