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Volumn 19, Issue 12, 1996, Pages
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High-K dielectric materials for DRAM capacitors
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITOR STORAGE;
PERMITTIVITY;
RANDOM ACCESS STORAGE;
SEMICONDUCTING SILICON;
DYNAMIC RANDOM ACCESS MEMORY CAPACITORS;
GIGABIT GENERATION;
STACK CAPACITOR STRUCTURE;
FERROELECTRIC MATERIALS;
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EID: 0030285572
PISSN: 01633767
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (6)
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References (31)
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