Surface vapor transport for accurate microoptics fabrication in compound semiconductors

Materials Chemistry and Physics

Volumn 46, Issue 2-3, 1996, Pages 265-268

  Liau, Z L ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Micro optics; Microfabrication; Semiconductors; Surface chemistry; Surface vapour transport

Indexed keywords

HEAT TREATMENT; MASS TRANSFER; OPTICAL DEVICES; PROTECTIVE ATMOSPHERES; SEMICONDUCTOR DEVICE MODELS; SUBSTRATES; SURFACE STRUCTURE;

SINUSOIDAL SURFACE PROFILES; SURFACE ENERGY INDUCED VAPOR TRANSPORT;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030285375     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(96)01809-3     Document Type: Article

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