Chemical Vapor Deposition of Carbon on Graphite by Methane Pyrolysis

AIChE Journal

Volumn 42, Issue 11, 1996, Pages 3123-3132

  Bammidipati, Sreekanth ^a   Stewart, Gregory D ^a   Elliott Jr , J Richard ^a   Gokoglu, Suleyman A ^b   Purdy, Mark J ^c  

^a The University of Akron   (United States)

^b NASA GLENN RESEARCH CENTER   (United States)

^c De icing and Specialty Systems Division   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTORS; FINITE ELEMENT METHOD; GRAPHITE; LAMINAR FLOW; MATHEMATICAL MODELS; METHANE; PHASE INTERFACES; PRESSURE EFFECTS; PYROLYSIS; REACTION KINETICS; TEMPERATURE CONTROL; THERMAL EFFECTS;

PRESSURE FALL OFF EFFECTS;

CHEMICAL VAPOR DEPOSITION;

EID: 0030285221     PISSN: 00011541     EISSN: None     Source Type: Journal    
DOI: 10.1002/aic.690421112     Document Type: Article

References (25)

1. Allendorf, M. D., and R. J. Kee, "A Model of Silicon Carbide Chemical Vapor Deposition," J. Electrochem. Soc., 138, 841 (1991).
2. Ascher, U., J. Christiansen, and R. D. Russell, "Collocation Software for Boundary-Value ODE's ACM," Trans. on Math. Software, 7, 209 (1981).
3. Baulch, D. L., C. J. Cobos, R. A. Cox, C. Esser, P. Frank, T. Just, J. A. Ker, M. J. Pilling, J. Troe, R. W. Walker, and J. Warnatz, J. of Phys. and Chem. Ref. Data, 21(3), 411 (1992).
4. Besmann, T. M., B. W. Sheldon, R. A. Lowden, and D. P. Stinton, "Vapor Phase Fabrication and Properties of Continuous-Filament Ceramic Composites," Sci., 253, 1104 (1991).
5. Bird, R. B., W. E. Stewart, and J. L. Lightfoot, Transport Phenomena, Wiley, New York (1960).
6. Blanquet, E., and S. A. Gokoglu, "Tractable Chemical Models for CVD of Silicon and Carbon," J. de Physique IV, 3, 43 (1993).
7. 2," Can. J. Chem., 53, 3,580 (1975),
8. Chung, G-Y., and B. J. McCoy, "Modeling of Chemical Vapor Infiltration for Ceramic Composites Reinforced with Layered, Woven Fabrics," J. Am. Ceram. Soc., 74, 746 (1991).
9. Comfort, J. H., and R. Reif, "Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures. I. Very Low Pressure Deposition," J. Electrochem. Soc., 136, 2386 (1989).
10. Danckwerts, P. V., Chem. Eng. Sci., 2, 1 (1953).
11. Dombrowski, N., E. A. Foumeny, and A. Riza, "Know the CFD Codes," Chem. Eng. Prog., 89(9), 46 (1993).
12. Frenklach, M., and Hai Wang, "Detailed Surface and Gas-Phase Chemical Kinetics of Diamond Deposition," Phys. Rev. B, 43, 1,520 (1991).
13. Gilbert, R. G., Theory of Unimolecular and Recombination Reactions, Bladewell Scientific, Boston (1990).
14. Hill, J., and K. R. Norman, "Hydrogen Desorption: A Possible Rate Determining Step in Pyrocarbon Formation," Proc. of the 12th Biennial Conf. on Carbon, Pittsburgh, PA, p. 225 (1975).
15. Je, J. H., and J. Y. Lee, "A Study on the Deposition of Pyrolytic Carbons form Hydrocarbons," Carbon, 22, 563 (1984).
16. Kiefer, J. H., and W. A. Von Drasek, "The Mechanism of Homogeneous Pyrolysis of Acetylene," Int. J. of Chem. Kinetics, 22, 747 (1990).
17. Kim, H. J., Y. Egashira, and H. Komiyama, "Molecular Size and Its Temperature Dependence of Growth Species in the Chemical Vapor Deposition Process of Aluminum Nitride," J. Chem. Vapor Dep., 1(7), 20 (1992).
18. Levenspiel, O., Chemical Reaction Engineering, p. 496, Wiley, New York (1972).
19. Makarov, K. I, and V. K. Pechik, "Kinetics of Methane Pyrolysis Under Conditions of Pyrolytic Carbon Formation," Carbon, 12, 391 (1974).
20. McCallister, P., and E. E. Wolf, "Simulation of a Multiple Substrate Reactor for Chemical Vapor Infiltration of Pyrolytic Carbon within Carbon-Carbon Composites," AIChE J., 39, 1196 (1993).
21. Neuschutz, D., S. Zimdahl, and E. Zimmerman, "Kinetics of Carbon Deposition by CVD from Ethylene-Hydrogen-Argon Mixtures at 1000 to 1100°C and 1 Bar Total Pressure," Proc. of the 12th International Symposium on CVD, K.J. Jensen and G. W. Cullen, eds., The Electrochem. Soc. (1993).
22. Press, W. H., S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in Fortran, Cambridge University Press, New York (1992).
23. Starr, T., A. Smith, T. Besmann, and Sheldon B. McLaughlin, "Modeling of Chemical Vapor Infiltration for Composite Fabrication," High Temperature Ceramic Matrix Composites, R. Naslain, J. Lamon, and D. Doumeingts, eds., European Association for Composite Materials, Bordeaux, France, p. 231 (1994).
24. Stewart, P. H., G. P. Smith, and D. M. Golden, "The Pressure and Temperature Dependence of Methane Decomposition," Int. J. of Chem. Kinetics, 21, 923 (1989).
25. Tsang, W., and R. R. Hampson, J. of Phys. and Chem. Ref. Data, 15, (1986).