Substrate temperature dependent photoelectrical and structural properties of a-Si:H deposited by hydrogen assisted chemical vapour deposition

Thin Solid Films

Volumn 288, Issue 1-2, 1996, Pages 337-345

  Lenski, M ^a   Comes, F J ^a  

^a GOETHE UNIVERSITY   (Germany)

Author keywords

a si:H; Chemical vapour deposition; Photoelectrical properties; Structural properties

Indexed keywords

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; CRYSTAL MICROSTRUCTURE; DENSITY MEASUREMENT (OPTICAL); HIGH TEMPERATURE EFFECTS; HYDROGENATION; INFRARED SPECTROSCOPY; PHOTOCONDUCTIVITY; SUBSTRATES;

AMORPHOUS HYDROGENATED SILICON FILMS; MICROSTRUCTURE PARAMETER; PHOTOELECTRICAL PROPERTIES; XENON FLASH LAMP;

AMORPHOUS FILMS;

EID: 0030284925     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08852-9     Document Type: Article

References (45)

1. D.L. Staebler and C.R. Wronski, Appl. Phys. Lett., 31 (1977) 292.
2. M. Pinarbasi, N. Maley, A. Myers and J.R. Abelson, Thin Solid Films, 171 (1989) 217.
3. Y.H. Liang, N. Maley and J.R. Abelson, J. Appl. Phys., 75 (1994) 3704.
4. M. Stutzmann, Philos. Mag. B, 60 (1989) 531.
5. F. Finger, U. Kroll, V. Viret, A. Shah, W. Beyer, X.-M. Tang, J. Weber, A. Howling and Ch. Hollenstein, J. Appl. Phys., 71 (1992) 5665.
6. U. Kroll, J. Meier, M. Goetz, A. Howling, J.-L. Dorier, J. Dutta, A. Shah and Ch. Hollenstein, J. Non-Cryst. Solids, 164-166 (1993) 59.
7. S. Nakano, S. Okamoto, T. Takahama, M. Nishikumi, K. Nimomiya, N. Nakamura, S. Tsuda, M. Ohnishi, Y. Kishi and Y. Kuwano, Proc. 21st IEEE Photovoltaic Specialists' Conf., 1990, IEEE, New York, 1990.
8. S.C. De, H. Tarui, A. Terakawa, E. Maruyama, K. Sayama, K. Ninomiya, S. Tsuda and S. Nakano, Jpn. J. Appl. Phys., 33 (1994) 5652.
9. P. Papadopoulos, A. Scholz, S. Bauer, B. Schröder and M. Oeschner, J. Non-Cryst. Solids, 164-166 (1993) 87.
10. R. Zedlitz, F. Kessler and M. Heintze, J. Non-Cryst. Solids, 164-166 (1993) 83.
11. H. Shirai, J. Hanna and I. Shimizu, Jpn. J. Appl. Phys., 30 (1991) L679.
12. N.M. Johnson, C.E. Nebel, P.V. Santos, W.B. Jackson, R.A. Street, K.V. Stevens and J. Walker, Appl. Phys. Lett., 59 (1991) 1443.
13. W.A. Nevin, H. Yamagashi and Y. Tawada, Jpn. J. Appl. Phys., 33 (1994) 4829.
14. A. Roth and F.J. Comes, J. Non-Cryst. Solids, 137-138 (1991) 721.
15. A. Roth, F.J. Comes and W. Beyer, 11th EC Photovoltaic Solar Energy Conf., Montreux, Switzerland, L. Guimarães, W. Palz, C. de Ryeff, H. Keiss and P. Helm (eds), Harwood Academic Pub., 1992, p. 594.
16. A. Roth, Präparation amorpher und mikrokristalliner Silizium-Dünnschichten mit Hilfe der Wasserstoffabstraktionsmethode, Shaker Press, Aachen, Germany (1994).
17. M. Stutzmann, M.C. Rossi and M.S. Brandt, Phys. Rev. B, 50 (1994) 11592.
18. N.F. Mott, in Topics in Applied Physics, Vol. 56, Springer, Heidelberg, 1984, p. 169.
19. M. Vanecek, J. Kocka, J. Stuchlik, Z. Kozisek, O. Stika and A. Trsika, Sol. Energy Mater., 8 (1983) 411.
20. M.L. Theye, Phys. Scr., 29 (1989) 157.
21. N. Wyrsch, F. Finger, T.J. McMahon and M. Vanecek, J. Non-Cryst. Solids, 137-138 (1991) 341.
22. J. Tauc, Phys. Status Solidi, 15 (1966) 627.
23. N. Maley, Phys. Rev. B, 46 (1992) 2078.
24. A.A. Langford, M.L. Fleet, B.P. Nelson, W.A. Lanford and N. Maley, Phys. Rev. B, 45 (1992) 13367.
25. P.J. Zanzucchi, in Semiconductors and Semimetals Vol. 21B, Academic Press, New York, 1984, p. 120.
26. W. Beyer and M. Wagner, Solid State Commun., 48 (1983) 585.
27. L. Ley, in Topics in Applied Physics, Vol. 56, Springer, Berlin, 1984.
28. M. Vanecek, A.H. Mahan, B.P. Nelson and R.S. Crandall, 11th EC Photovoltaic Solar Energy Conf., Montreux, Switerland, L. Guimarães, W. Palz, C. de Ryeff, H. Keiss and P. Helm (eds), Harwood Academic Pub., 1992, p. 96.
29. A. Herbert, private communication, University of Frankfurt (1995).
30. R. Becerraand R. Walsh, J. Phys. Chem., 91 (1987) 5765.
31. S.K. Loh and J.M. Jasinski, J. Chem. Phys., 95 (1991) 4914.
32. W.E. Jones, S.D. Macknight and L. Teng, Chem. Rev., 73 (1973) 407.
33. T.R. Dietrich, S. Chiussi, M. Marek, A. Roth and F.J. Comes, J. Phys. Chem., 95 (1991) 9302.
34. A.P. Dickinson, H.E. O'Neal and M.A. Ring, Organometallics, 10 (1991) 3513.
35. J.H. Jasinski and J.O. Chu, J. Chem. Phys., 88 (1988) 1678.
36. N.L. Arthur, P. Potzinger, B. Reimann and H.P. Steenbergen, J. Chem. Soc. Faraday Trans. 2, 85 (1989) 1447.
37. N.L. Arthur and T.N. Bell, Rev. Chem. Intermed., 2 (1978) 37.
38. R. Becerra and R. Walsh, J. Phys. Chem., 96 (1992) 10856.
39. J.R. Doyle, D.A. Doughty and A. Gallagher, J. Appl. Phys., 71 (1992) 4771.
40. G. Ganguly and A. Matsuda, Phys. Rev. B, 47 (1993) 3661.
41. R.A. Street, Phys. Rev. B, 43 (1991) 2454; 44 (1991) 10610.
42. R.A. Street, Phys. Rev. B, 43 (1991) 2454; 44 (1991) 10610.
43. J.-L. Guizot, K. Nomoto and A. Matsuda, Surf. Sci., 244 (1991) 22.
44. K. Maeda, A. Kuroe and I. Umezu, Phys. Rev. B, 51 (1995) 10635.
45. P. Roca i Cabarrocas, Y. Bouizim and M.L. Theye, Philos. Mag. B, 65 (1992) 1025.